【公式】株式会社トーカイ｜最先端の薄膜成膜技術。薄膜の蒸着・成膜・スパッタリングなど。光学技術が脚光を浴びる今日、その情熱をいっそう強く持って事業展開をしております。

【公式】株式会社トーカイ｜最先端の薄膜成膜技術。薄膜の蒸着・成膜・スパッタリングなど。光学技術が脚光を浴びる今日、その情熱をいっそう強く持って事業展開をしております。

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Products & Services Products & Services

Coating to large size material

Our ultrasonic cleaning equipment is capable of cleaning large substrates measuring approximately 320 mm x 320 mm, making it suitable for products used in semiconductor equipment that demand high appearance quality.

Spectral Data

Usage

Case Study


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